MIT-Micro-/Nano-electromechanical Devices and Systems

Keywords: MEMS/NEMS, nanotechnology, nanomaterials, sensors and transducers, electromechanical computing

Recommendation: This program is designed for students interested in electromechanics and electromechanical devices for applications in the internet of things (IoT)

Abstract

Micro-/Nano-electromechanical systems (MEMS/NEMS) that sense, actuate and control at the microscale or nanoscale have thrived for decades, and the versatility of MEMS/NEMS devices can be traced from our headsets, smartphones, inkjet printers, to the navigation systems in vehicles, airplanes and drones. The emerging IoT, which aims at building smart interactions for all objects in an interconnected physical world, relies on pervasive networks consisting of miniaturized, reliable, and maintenance-free devices and systems as the hardware platform to access various information sources and acquire abundant data, which will further be processed by AI-powered devices or machines to assist with decision-making. The IoT has created unprecedented opportunities and challenges to MEMS/NEMS technology, asking for both exceptional performance and high energy-efficiency. The advent of nanomaterials and the advancement in nanotechnology have inspired innovative device concepts and stimulated improvements of conventional MEMS/NEMS technology in many ways.

Nanomaterials (e.g., carbon nanotubes, graphene) have been utilized as functional components in MEMS/NEMS devices to achieve ultra-small pitches and ultra-high speeds. Molecular coating on the surface of electrodes has been proved effective to reduce power consumption and avoid device failure of MEMS/NEMS switches. Unique properties of specific nanomaterials or molecules even enable ultra-sensitive sensing for a variety of applications. The fusion of microfabrication techniques, material science, molecular nanotechnology and surface chemistry promises a vision of self-sustained systems for IoT with high-performance sensors and energy-efficient micro-controllers powered by electromechanical computing, which consume energy scavenged from ambient environment by MEMS energy harvesters.

This program will focus on the structure and mechanism of a number of MEMS/NEMS devices such as sensors, switches, and energy harvesters. Advantages of the devices that leverage the merits of nanomaterials and molecules will be explored through modeling the device behavior and comparison with conventional counterparts. Typical microfabrication and nanofabrication techniques (lithography, etching, deposition, etc.) will also be introduced to provide students an idea of how MEMS/NEMS devices are made. Next, prospects and challenges of MEMS/NEMS technology will be discussed in the context of IoT applications. At the end of the program, students are encouraged to choose one device type and write a 2-3 pages review report.